1

Miniature X-Ray Sources

Year:
2017
Language:
english
File:
PDF, 2.03 MB
english, 2017
4

Structural and electrical properties of Ti-Al thin films

Year:
1979
Language:
english
File:
PDF, 269 KB
english, 1979
12

Miniature and MEMS-type vacuum sensors and pumps

Year:
2009
Language:
english
File:
PDF, 721 KB
english, 2009
17

Low vacuum MEMS Ion-sorption Micropump

Year:
2016
Language:
english
File:
PDF, 579 KB
english, 2016
19

Magnetron-like miniature ion source

Year:
2018
Language:
english
File:
PDF, 2.57 MB
english, 2018
25

Vacuum and Residual Gas Composition MEMS Sensor

Year:
2015
Language:
english
File:
PDF, 979 KB
english, 2015
33

Electron field emission from microtip arrays

Year:
2008
Language:
english
File:
PDF, 647 KB
english, 2008
41

Field-emission electron source for vacuum micropump

Year:
2011
Language:
english
File:
PDF, 606 KB
english, 2011